[医][=damaging ultraviolet]紫外线损伤;
例句:
A real-time exposure dose control algorithm for DUV excimer lasers in a step and scan projection lithography is presented.
提出了一种面向步进扫描投影光刻机的深紫外准分子激光实时曝光剂量控制算法。
The experiments on DUV coating deposited by ALD are carried out.
对ALD制备深紫外薄膜进行了研究。
Application of DUV deep lithography in LIGA process
深紫外深度光刻蚀在LIGA工艺中的应用