IIL的翻译

Imaging Interferometric Lithography ( IIL) has high resolution of interferometric lithography ( IL) and ability for printing arbitrary patterns of optical lithography ( OL).

成像干涉光刻技术（IIL）具有干涉光刻技术（IL）的高分辨力和光学光刻技术（OL）产生任意形状集成电路特征图形的能力。

The large angle oblique illumination in IIL is an extension of OAI. A comparison of IIL with OAI in theory and frequency domain is given.

从成像原理和频域范围的角度对IIL和OAI进行了理论研究、计算模拟和对比分析。

In this paper, research and development were carried out on manufacturing a unit chip structure, which is called integration injection logic ( hereinafter referred to as IIL) using a special process.

本文以实际生产制造过程中，某芯片采用的一种特殊工艺单元结构集成注入逻辑为研究对象，对该单元器件的功能以及如何实现并优化大规模加工工艺进行探究。